Abstract: As an economical and effective tunnel structure system, the parallel tunnel layout pattern is becoming one of the main tunnel structures in underground rail transit design. Since the applied force is complicated and various factors involved are mutually affected, it is urgent to understand the law of ground surface settlement induced by tunnel excavation. Based on FEM simulation and the measured surface settlement data of Qingdao metro, the evolution laws of settlement rate and range in transverse and longitudinal directions of the first tunnel tube were analyzed,and the deformation rules of original surface settlement trough due to the sequential construction of the second tunnel tube were revealed. The study shows that because of the influence of excavation parameters and geological paraneters,the maximum settlement point of original transverse settlement trough offsets to the symmetric point of two tunnels in specific velocity rate, and the variation of original longitudinal ground settlements at various points transmit along the excavation direction of second tunnel tube in a form similar to fluctuation with the characteristics of settlements being closely related to the distance from the second tunnel tube.